High Speed Ultrasonic Piezo Linear Motor Drive |
Stick-Slip (Inertia) Piezo Motor Principle |
PiezoWalk® Motors Force + Precision |
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PI currently manufactures three basic types of piezoelectric motors: Ultrasonic motors (resonant motors), stepper motors (PiezoWalk®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.
Ultrasonic resonant motors (PILine®) are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design. Piezo-Walk motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast. Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Read Stick-Slip Performance Article. Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds. Other Linear Motors based Magnetic Drive Technologies are also available for automation purposes. | All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry. More Information and Links to Applications... | |
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Stick Slip Piezo Motors / Inertial Motors
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| Models* | Description | Force [N] |
Travel [mm] | Drive | |
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Q-522 Datasheet |
Compact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option More Information |
3 | 6.5, 13, 26, 32 | PIShift Inertial Stick-Slip motor |
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Q-622 Datasheet |
Compact Rotary Stage, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information |
- | Diam: 14, 22, 30 | PIShift Inertial Stick-Slip motor |
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N-470 Datasheet |
Compact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information |
22 | 7.5, 13, 26 | PIShift Inertial Stick-Slip motor |
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N-422 Datasheet |
Compact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information |
10 | 40 | PIShift Inertial Stick-Slip motor |
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| PiezoWalk Linear Motors (Piezo-Step Motors) |
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| High-Resolution Nanopositioning Motors | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] |
Drive | |
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N-381 Datasheet |
NEXACT® linear actuator, nanomanipulator, piezo stepper, self locking at rest More Information |
1 | 30 | NEXACT® Piezo-Walk® linear motor |
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N-310 Datasheet |
PiezoWalk NEXACT® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Information |
1 | 10 to 125 | NEXACT® Piezo-Walk® linear motor |
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N-111 Datasheet |
NEXLINE® PiezoWalk® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
More Information |
7 | 10 | NEXLINE® Piezo-Walk® linear motor |
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N-216 Datasheet |
NEXLINE® PiezoWalk® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. More Information |
80 | 20 | NEXLINE® Piezo-Walk® linear motor |
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N-565 Datasheet |
Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest More Information |
2 | 13 to 52 | NEXACT® Piezo-Walk® linear motor |
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N-725 Datasheet |
Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest More Information |
1 | 2 | NEXACT® Piezo-Walk® linear motor |
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N-515 Datasheet |
Non-Magnetic Piezo Hexapod Precision Positioning System More Information |
50 | 10 mm Linear, 6° Rotation |
NEXLINE® Piezo-Walk® Linear Motor |
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E-712 Datasheet |
Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution More Information |
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E-861 Datasheet |
PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners More Information |
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  Piezo-Walk®Working Principle | |||||
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| Linear Stages with Ultrasonic Piezo Linear Motors | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] | Drive | |
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U-521 Datasheet |
Smallest piezo motor positioning stage with linear encoder and ultrasonic motor, speed to 250 mm/s, 0.1 µm resolution, self locking at rest XY combinations available Watch Video More Information |
0.5 | 18 | PILine® ultrasonic motor |
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U-751 Datasheet |
XY piezo motor positioner stage with linear encoder, 0.1 µm resolution, self locking at rest More Information |
5 | 25 | PILine® ultrasonic piezo motor |
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M-687 Datasheet |
Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest More Information |
5 | 185 x 225 mm | PILine® ultrasonic piezo motor |
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| Piezoelectric Rotary Motors / Stages | |||||
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| Models* | Description | Travel [Deg] | Load Capacity[kg] | Drive | |
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Rotary Stage Brochure |
Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest More Information
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Unlimited |
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PILine® ultrasonic piezo motor |
 PILine® Ultrasonic Piezomotors Working Principle | |||||
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| Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors | |||||
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| Models* | Description | Channels | Outputs for Motor Types |
Interfaces | |
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C-872 Datasheet |
Driver for all PILine® Ultrasonic Piezomotors, analog control input, minimum heat generation More Information |
1 | PILine® Piezomotor |
Analog -10V to +10V |
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C-877 Datasheet |
High-speed, closed-loop controller/driver for closed-loop PILine® piezomotors. More Information |
1, 2 | PILine® Piezomotor |
USB, RS-232 |
* Ask about custom designs! | |||||
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Complete Piezo Motor Catalog (PDF)
Piezo Motor White Papers |
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Nanopositioning Flexure Piezo Stages
Piezo Stack Actuators & Transducers
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