Piezo Motor Solutions for Automation
& Precision Motion Control


High Speed Ultrasonic Piezo Linear Motor Drive

Stick-Slip (Inertia) Piezo Motor Principle
Low-Profile Rotary Piezo Motor Stage
PiezoWalk® Motors
Force + Precision
Piezo motors are based on the piezoelectric effect. These compact, efficient mechanisms can be employed in precision motion control applications, replacing electrodynamic motors.

PI currently manufactures three basic types of piezoelectric motors:
Ultrasonic motors (resonant motors), piezo stepper motors (PiezoWalk®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.

Ultrasonic resonant motors (PILine®) are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design.

Piezo-Walk motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast.

Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Read Stick-Slip Performance Article.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

Other Linear Motors based Magnetic Drive Technologies are also available for automation purposes.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...

Piezo Motor Catalog
    Stick-Slip, Ultrasonic and Stepping Piezo Motors,
     with Introduction

Positioners with Ultrasonic Motors (PDF)       
Piezo Motor White Papers

Nanopositioning Flexure Piezo Stages     
Piezo Stack Actuators & Transducers

PI Piezo Motor Videos
Piezo Motor for OCT Scanner
More Papers and Literature




  Stick Slip Piezo Motors / Inertial Motors

Models* Description Force
[N]
Travel [mm] Drive
Stick Slip Motor Q-522
Piezo Motor Datasheet
Compact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option
More Info: Small Stages with Piezo Inertia Motors
3 6.5, 13, 26, 32 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor Q-622
Piezo Motor Datasheet
Compact Rotary Stage, Self Locking, Based on Stick-Slip Effect, Vacuum Option
More Info: Compact Piezo Rotary Motor Stages
- Diam: 14, 22, 30 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor N-470
Piezo Motor Datasheet
Compact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum Option
More Info: Piezo Ratchet Motors
22 7.5, 13, 26 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor N-422
Piezo Motor Datasheet
Compact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option
More Info: Piezo Linear Motor Actuators
10 40 PIShift
Inertial Stick-Slip
motor
PiezoWalk Linear Motors (Piezo-Step Motors)
High-Resolution Nanopositioning Motors
Models* Description Load
Capacity
[kg]
Travel
[mm]
Drive
Piezo Motor Stepper Actuator N-381 N-381
Piezo Motor Datasheet
NEXACT® linear actuator, nanomanipulator, piezo stepper, self locking at rest
More Information on PiezoWalk Linear Motors
1 30 NEXACT® Piezo-Walk®
linear motor
Piezo Motor Actuator N-310 N-310
Piezo Motor Datasheet
PiezoWalk NEXACT® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
More Info: PiezoWalk Linear Motors
1 10 to 125 NEXACT® Piezo-Walk®
linear motor
Piezo Motor Actuator N-111 N-111
Piezo Motor Datasheet
NEXLINE® PiezoWalk® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
More Info: High Force PiezoWalk Linear Motors
7 10 NEXLINE® Piezo-Walk®
linear motor
Piezo Motor Actuator N216 N-216
Piezo Motor Datasheet
NEXLINE® PiezoWalk® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest.
More Info: High-Load PiezoWalk Linear Motors
80 20 NEXLINE® Piezo-Walk®
linear motor
Piezo Motor Linear N-565 PiezoWalk Motor Stage N-565
Piezo Motor Datasheet
Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest
More Info: Piezo Motor Linear Stages
2 13 to 52 NEXACT® Piezo-Walk®
linear motor
Piezo Motor fast focus N-725 N-725
Piezo Motor Datasheet
Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest
More Info: Fast Piezo Focus Motors
1 2 NEXACT® Piezo-Walk®
linear motor
Piezo Motor 6-axis N-515.KNPH N-515
Piezo Motor Datasheet
Non-Magnetic Piezo Hexapod Precision Positioning System
More Information on Mult-Axis Positioners
50 10 mm Linear,
6° Rotation
NEXLINE® Piezo-Walk® Linear Motor
Piezo Motor Controller E-712
Piezo Motor Controller Datasheet
Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution
More Info: PiezoWalk Motor Controllers
Piezo Motor Controller E-861
Piezo Motor Controller Datasheet
PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners
More Info: PiezoWalk Motor Controllers
   Piezo-Walk®Working Principle
Linear Stages with Ultrasonic Piezo Linear Motors
Models* Description Load
Capacity [kg]
Travel [mm] Drive
Piezo Motor stage U-521
Piezo Motor Datasheet
Smallest piezo motor positioning stage with linear encoder and
ultrasonic motor, speed
to 250 mm/s, 0.1 µm resolution, self locking at rest
XY combinations available
Watch Video

More Info: Ultrasonic Piezo Motors
0.5 18 PILine®
ultrasonic
motor
Piezo Motor XY stage U-751
Piezo Motor Datasheet
XY piezo motor positioner stage with linear
encoder, 0.1 µm resolution, self locking at rest
More Information on XY Ultrasonic Piezo Motors
5 25 PILine®
ultrasonic
piezo motor
Piezo Motor xy stage M-686K U-780/M-687
Piezo Motor Datasheet
Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest
More Information: XY Stages with Ultrasonic Piezo Motors
5 185 x 225 mm PILine®
ultrasonic
piezo motor
Piezoelectric Rotary Motors / Stages
Models* Description Travel [Deg] Load Capacity[kg] Drive
Piezo Motor  Rotary Motor


Rotary Stage
Brochure


Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest
More Info: Piezo Rotary Motor Stages

 

Video: Rotary Stage Drive Principle

More on Rotation Stages



Unlimited


1


PILine®
ultrasonic
piezo motor
  PILine® Ultrasonic Piezomotors Working Principle
Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors
Models* Description Channels Outputs for
Motor Types
Interfaces
Compact ultrasonic Piezo Motor controller C-877
Piezo Motor Controller Datasheet
Mini Controller for PILine® Ultrasonic Piezomotors
More Info: Ultrasonic Piezo Motor Controllers
1 PILine®
Piezomotor
Analog
-10V to +10V
Ultrasonic Piezo Motor_Controller C-877
Piezo Motor Controller Datasheet
High-speed, closed-loop controller/driver
for closed-loop PILine® piezomotors.
More Info: Ultrasonic Piezo Motor Controllers
1, 2 PILine®
Piezomotor
USB, RS-232

* Ask about custom designs!


Complete Piezo Motor Catalog (PDF)        Piezo Motor White Papers
Nanopositioning Flexure Piezo Stages      Piezo Stack Actuators & Transducers



M-660 Ultra-Low Profile Ultrasonic Rotation Stage






Animated 3D Mode of an Ultrasonic Rotary Piezo Motor, Measured with a Scanning Vibrometer





More Papers and Literature



Piezo motors and actuators Streamlining
     medical device performance

Piezo Motor Brochures: Ultrasonic High Speed Motors for
     Automation PiezoWalk® Piezo Motors for Ultra-Precision
     Motion Control

White Papers on Ultrasonic Piezo Motors: Ultrasonic
     Piezo Rotary Motors and Linear Piezo Motors

Piezo-Based, Long-Travel Actuators For Special
     Environmental Conditions

Survey of the Various Operating Principles of Ultrasonic
     Piezomotors

Miniature Piezo Motor for Medical Device Manufacturers
High Precision Piezo Linear Motor for Semiconductor
     Applications

New Linear Ultrasonic Micromotor for Precision Mechatronic
     Systems

More on Linear Ultrasonic Micromotor for Precision
     Mechatronic Systems

Piezo Motor Tech Blog
Piezo Motor for OCT Scanner
Nanometer Precise Hybrid Actuator in Positioning Mechanism
     with Long Travel Range

Test Stand for Analyzing New Types of High-Performance
     Ultrasonic Piezomotor Drives

Hybrid Piezo Motor Actuators
Piezo Motor Principles