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Download a PDF copy of PI Newsletter #40
PILine®: Miniature Piezo Motor / Slide for High Volume Applications
NEXACT®: Novel Compact OEM Piezo Stepping Motor / Actuator with Long Travel Range
M-674 PILine® RodDrive: Integrated Ultrasonic Piezoelectric Linear Actuator
Controller for NEXACT® Piezo Linear Motor Actuators
P-652 Ultra-Compact Ultra-Sonic Actuators
New PiezoWalk Brochure

Piezo Step Motor Brochure


New PILine Brochure

Ultrasonic Piezomotor
for High-Speed Actuation
and Positioning


530 page PI Catalog

Get the hardbound, 530
    page PI Catalog
Piezo Motor Solutions for Automation & Ultra-Precision Motion Control
Piezo Motor Brochure PDF Download       Piezo Motor White Papers
Nanopositioning Flexure Piezo Stages      Piezo Stack Actuators & Transducers


Low-Profile & High-Speed with Ultrasonic Piezomotors, Direct Position Metrology

High Speed Ultrasonic Piezo Linear Motor Drive (Pusher)

Low Profile XY Piezo Motor Stages with Insert Option

Ultra Precision (Sub-nm) PiezoWalk® High Force Piezomotors
 
PI currently manufactures two basic types of piezoelectric linear motors: Ultrasonic linear motors (resonant motors), and stepper motors (PiezoWalk®). Both offer an auto-locking feature and can basically provide unlimited travel, yet they are very different in their design, specifications and performance.

PILine® ultrasonic resonant motors are characterized by very high speed to 800 mm/s and a very compact and simple design (systems down to 8 mm are available).

NEXLINE® & NEXACT® piezo step linear motors can achieve much higher forces and picometer range resolution but are not as fast.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...
Ultrasonic Motor Selection Guide
PiezoWalk Stepping Motor Selection Guide
Piezo Motor Cell-phone Camera Module: Auto Focus & Zoom
Download the PI Piezo Motor PDF Brochures
Piezo Linear Motor Introduction
PILine® Ultrasonic Piezomotor Working Principle
NEXLINE® Piezo-Walk® Working Principle
Test and Quality Control at PI
More Papers and Literature
PI Piezo Motor Videos
Piezo Motor for OCT Scanner



Ultrasonic Motors, Actuators and Stages
Ultrasonic Piezo Linear Motors Ultrasonic Piezo Linear
Motors / Actuators		 Linear Stages w/ Ultrasonic Motors XY-Piezomotor
Stages		 High-Speed
Rotation Stage

Fast
Ultra Compact
Unlimited Travel
Fast: to 800 mm/sec
Compact
Self-Locking
Travel: 20 mm-50 mm
20000 h MTBF
Vacuum Versions
Fast: to 100 mm/s
Travel: 25 x 25 mm
0.1 µm Resolution
Ultra-Low Profile
    (0.6”, 16mm)
High Speed
Closed-Loop

Piezo Stepper Motors (PiezoWalk®), Flexure Actuators & Classical Piezo Actuators
Piezo Stepper Nanopositioning Motors Piezo Stepper Motor Controllers Piezostage Systems & Flexure Actuators Piezo Bender Actuators PICMA® Piezo Stack Actuators
Sub-nm Resolution
Push/Pull to 60 Kg
Vacuum Compatible
High Resolution
Unlimited Travel
High Dynamics 		Flexure Guided
Closed- & Open-Loop
Resolution <1 nm 		Closed-Loop
Vacuum-Compatible
Travel: to 2 mm 		Extreme Lifetime
Sub-msec Response
Sub-nm Resolution

Selection Guides: Piezo Linear Motors: Ultrasonic & Step Motors
Piezo Linear Actuators | Piezostage Systems | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
NEXLINE® & NEXACT® Ultra-High-Resolution Nanopositioning Drives
Click Image for
Data Sheet		 Models* Description Load
Capacity [kg]		 Travel [mm] Drive
N-310 N-310 NEXACT® Ultra-compact nanopositioning drive, subnanometer resolution. 1 20 Piezo-Walk®
N-111 N-111 NEXLINE® PiezoWalk® nanopositioning drive, subnanometer resolution. 7 10 Piezo-Walk®
N-216 N-216 NEXLINE® PiezoWalk® high-load nanopositioning drive, subnanometer resolution. 80 20 Piezo-Walk®
E-755 NEXLINE Controller E-755 Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution
Ultrasonic Piezo Linear Motors / Actuators for OEMs
Click Image for
Data Sheet		 Models* Description Load
Capacity [kg]		 Travel [mm] Drive
U-164 U-164 Fast, Compact OEM Ultrasonic Linear Motor - - PILine® ultrasonic motor
P-661 P-661 Ultrasonic OEM piezo linear motor, small, light, very fast - - PILine® ultrasonic motor
M-674 M-674 RodDrive Ultrasonic Piezo Linear Motor Pusher for OEMs 0.7 100 PILine® ultrasonic motor
Linear Stages with Ultrasonic Piezo Linear Motors
Click Image for
Data Sheet		 Models* Description Load
Capacity [kg]		 Travel [mm] Drive
M-661, M-662 M-661,
M-662		 Miniature stages with linear
motor drive, open-loop, speeds to
500 mm/s, 0.1 µm resolution		 0.5 18, 20 PILine® ultrasonic motor
M-663 M-663 Smallest stage with linear encoder and
linear motor drive, speed
to 500 mm/s, 0.1 µm resolution.
XY combinations possible		 0.5 20 PILine® ultrasonic motor
M-664 M-664 M-664 micropositioning systems are low-profile, high-accuracy translation stages with piezo linear encoders. 0.5 25 PILine® ultrasonic motor
M-683 M-683 M-683 Precision Micro Translation Stage 5 50 PILine® ultrasonic motor
M-686 M-686 Linear motor-driven XY stage with linear
encoder, 0.1 µm resolution		 5 25 PILine® ultrasonic motor
M-545.U M-545.2U Linear motor-driven XY stage with linear
encoder, 0.5 µm resolution		 5 25 x 25 PILine® ultrasonic motor
Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors
Click Image for
Data Sheet		 Models* Description Channels Outputs for
Motor Types		 Interfaces
C-180 C-180 -
C-185		 Analog / pulsed drivers
for PILine® ultrasonic piezo linear motors.		 1 PILine®
Piezomotor		 TTL / analog
C-170 C-170 Redstone open-loop controller/driver
for PILine® ultrasonic piezo linear motors.		 1, 2 PILine®
Piezomotor		 RS-232
C-867 C-867 High-speed, closed-loop controller/driver
for closed-loop PILine® piezomotors.		 1, 2 PILine®
Piezomotor		 USB, RS-232
Piezoelectric Rotary Motors
Click Image for
Data Sheet		 Models* Description Travel [Deg] Load Capacity [kg]
M-660 Rotary Motor
 M-660 Fast Positioning, Ultra-Low Profile
See M-660 Video		 Unlimited 1
Rotary Motors PMR 40.08 Nonmagnetic, for low-speed applications, suited for hazardous environments, excellent start-stop performance, millisecond response time


* Ask about custom designs!
More Papers and Literature

Piezo motors and actuators Streamlining
     medical device performance
Piezo Motor Brochures: Ultrasonic High Speed Motors for
     Automation PiezoWalk® Piezo Motors for Ultra-Precision
     Motion Control
White Papers on Ultrasonic Piezo Motors: Ultrasonic
     Piezo Rotary Motors and Linear Piezo Motors
New technique for studying nanoscale friction at sliding
     velocities up to 200 mm/s using atomic force microscope
     (by Zhenhua Tao and Bharat Bhushan). Uses a custom tuned
     piezomotor stage.
Piezo-Based, Long-Travel Actuators For Special
     Environmental Conditions
Survey of the Various Operating Principles of Ultrasonic
     Piezomotors
Miniature Piezo Motor for Medical Device Manufacturers
High Precision Piezo Linear Motor for Semiconductor
     Applications
New Linear Ultrasonic Micromotor for Precision Mechatronic
     Systems
More on Linear Ultrasonic Micromotor for Precision
     Mechatronic Systems
Piezoelectric Motor Basics on Wikipedia
Piezo Motor for OCT Scanner
Nanometer Precise Hybrid Actuator in Positioning Mechanism
     with Long Travel Range
Test Stand for Analyzing New Types of High-Performance
     Ultrasonic Piezomotor Drives
Hybrid Piezo Motor Actuators
Piezoelectric Motor Selection Guide
PI Piezo Motor News at the ACTUATOR 2006 Conference
Piezo Motor Application: Miniature Motor in Cell-phone Camera Module for Auto Focus & Zoom


M-660 Ultra-Low Profile Ultrasonic Rotation Stage




Animated 3D Mode of an Ultrasonic Rotary Piezo Motor,
Measured with a Scanning Vibrometer


Ultrasonic Piezo Motor Driven Stage, Animation

 PI NEXLINE® Piezo Motor Animation (Dithering & Step Mode)

Watch Piezo Mini Motor Video
P-652 In Motion

 Watch PI RodDrive Animation
PILine RodDrive Piezo Motor integrated in positioning stage, animation.