Piezo Motor Solutions for Automation
& Precision Motion Control


High Speed Ultrasonic Piezo Linear Motor Drive	Low-Profile Rotary Piezo Motor Stage	Low Profile Piezo Motor Stage	Ultra Precision (Sub-nm) PiezoWalk^® High Force Piezomotors

PI currently manufactures three basic types of piezoelectric motors: Ultrasonic motors (resonant motors), stepper motors (PiezoWalk^®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.

Ultrasonic resonant motors (PILine^®) are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design.

Piezo-Walk motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast.

Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Read Stick-Slip Performance Article.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

Other Linear Motors based Magnetic Drive Technologies are also available for automation purposes.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...

Piezo Motor Catalog
    Stick-Slip, Ultrasonic and Stepping Piezo Motors,
     with Introduction
Positioners with Ultrasonic Motors (PDF)
Piezo Motor White Papers

Nanopositioning Flexure Piezo Stages
Piezo Stack Actuators & Transducers

PI Piezo Motor Videos
Piezo Motor for OCT Scanner
More Papers and Literature




Stick Slip Piezo Motors / Inertial Motors

	Models*	Description	Force [N]	Travel [mm]	Drive

	Q-522 Datasheet	Compact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option More Information	3	6.5, 13, 26, 32	PIShift Inertial Stick-Slip motor

	Q-622 Datasheet	Compact Rotary Stage, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information	-	Diam: 14, 22, 30	PIShift Inertial Stick-Slip motor

	N-470 Datasheet	Compact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information	22	7.5, 13, 26	PIShift Inertial Stick-Slip motor

	N-422 Datasheet	Compact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Information	10	40	PIShift Inertial Stick-Slip motor


PiezoWalk Linear Motors (Piezo-Step Motors)


High-Resolution Nanopositioning Motors

	Models*	Description	Load Capacity [kg]	Travel [mm]	Drive

	N-381 Datasheet	NEXACT^® linear actuator, nanomanipulator, piezo stepper, self locking at rest More Information	1	30	NEXACT® Piezo-Walk^® linear motor

	N-310 Datasheet	PiezoWalk NEXACT^® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Information	1	10 to 125	NEXACT® Piezo-Walk^® linear motor

	N-111 Datasheet	NEXLINE^® PiezoWalk^® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Information	7	10	NEXLINE^® Piezo-Walk^® linear motor

	N-216 Datasheet	NEXLINE^® PiezoWalk^® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. More Information	80	20	NEXLINE^® Piezo-Walk^® linear motor

	N-565 Datasheet	Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest More Information	2	13 to 52	NEXACT® Piezo-Walk^® linear motor

	N-725 Datasheet	Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest More Information	1	2	NEXACT® Piezo-Walk^® linear motor

	N-515 Datasheet	Non-Magnetic Piezo Hexapod Precision Positioning System More Information	50	10 mm Linear, 6° Rotation	NEXLINE® Piezo-Walk^® Linear Motor

	E-755 Datasheet	Piezocontroller for NEXLINE^® nano-drive, 32-bit digital filters, 24-bit DAC resolution More Information

	E-861 Datasheet	PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners More Information
Piezo-Walk®Working Principle




Linear Stages with Ultrasonic Piezo Linear Motors



	Models*	Description	Load Capacity [kg]	Travel [mm]	Drive

	M-663 Datasheet	Smallest piezo motor positioning stage with linear encoder and ultrasonic motor, speed to 250 mm/s, 0.1 µm resolution, self locking at rest XY combinations available Watch Video More Information	0.5	18	PILine® ultrasonic motor

	M-664 Datasheet	M-664 low-profile, piezo motor positioner stage with linear encoder, self locking at rest More Information	0.5	25	PILine® ultrasonic piezo motor

	M-683 Datasheet	M-683 precision piezo motor positioner stage More Information	5	50	PILine® ultrasonic motor

	M-686 Datasheet	XY piezo motor positioner stage with linear encoder, 0.1 µm resolution, self locking at rest More Information	5	25	PILine® ultrasonic piezo motor

	M-687 Datasheet	Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest More Information	5	185 x 225 mm	PILine® ultrasonic piezo motor


Piezoelectric Rotary Motors / Stages

	Models*	Description	Travel [Deg]	Load Capacity[kg]	Drive

	M-660 Datasheet	Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest More Information Video: Rotary Stage Drive Principle More on Rotation Stages	Unlimited	1	PILine® ultrasonic piezo motor
PILine® Ultrasonic Piezomotors Working Principle


Ultrasonic Piezo Motor Controllers/Drivers for PILine^® Motors

	Models*	Description	Channels	Outputs for Motor Types	Interfaces

	C-872 Datasheet	Driver for all PILine® Ultrasonic Piezomotors, analog control input, minimum heat generation More Information	1	PILine^® Piezomotor	Analog -10V to +10V

	C-867 Datasheet	High-speed, closed-loop controller/driver for closed-loop PILine^® piezomotors. More Information	1, 2	PILine^® Piezomotor	USB, RS-232
* Ask about custom designs!