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Download a PDF copy of PI Newsletter #37
PILine®: Miniature Piezo Motor / Slide for High Volume Applications
M-674 PILine® RodDrive: Integrated Ultrasonic Piezoelectric Linear Actuator
Controller for NEXACT® Piezo Linear Motor Actuators
P-652 Ultra-Compact Ultra-Sonic Actuators
New PiezoWalk Brochure

Piezo Step Motor Brochure

New PILine Brochure

Ultrasonic Piezomotor
for High-Speed Actuation
and Positioning

500 page PI Catalog

Get the hardbound, 500
    page PI Catalog
Piezo Motor Solutions for Automation & Ultra-Precision Motion Control
Piezo Motor Brochure PDF Download       Piezo Motor White Papers
Nanopositioning Flexure Piezo Stages      Piezo Stack Actuators & Transducers

Micro Piezomotor Linear Drive High velocity, Compact size (as small as 8mm long)

High Speed Ultrasonic Piezo Linear Motor Drive (Pusher)

Low Profile XY Piezo Motor Stages with Insert Option

Ultra Precision (Sub-nm) PiezoWalk® High Force Piezomotors
PI currently manufactures two basic types of piezoelectric linear motors: Ultrasonic linear motors (resonant motors), and stepper motors (PiezoWalk®). Both offer an auto-locking feature and can basically provide unlimited travel, yet they are very different in their design, specifications and performance.

PILine® ultrasonic resonant motors are characterized by very high speed to 800 mm/s and a very compact and simple design (systems down to 8 mm are available).

NEXLINE® & NEXACT® piezo step linear motors can achieve much higher forces and picometer range resolution but are not as fast.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...
Selection Guides
Piezo Motor Cell-phone Camera Module: Auto Focus & Zoom
Download the PI Piezo Motor PDF Brochures
Piezo Linear Motor Introduction
PILine® Ultrasonic Piezomotor Working Principle
NEXLINE® Piezo-Walk® Working Principle
Test and Quality Control at PI
More Papers and Literature
PI Piezo Motor Videos
Piezo Motor for OCT Scanner

Ultrasonic Motors, Actuators and Stages
Ultrasonic Micro
Motors / Stages
Ultrasonic Piezo Linear
Motors / Actuators
Linear Stages w/ Ultrasonic Motors XY-Piezomotor
Ultrasonic Piezo
Motor Controllers

Cost Effective
Ultra Compact
Travel Range 3.2 mm

Fast: to 800 mm/sec

Travel: 20 mm-50 mm
20000 h MTBF
Vacuum Versions

Fast: to 100 mm/s
Travel: 25 x 25 mm
0.1 µm Resolution

Open- & Closed-Loop
1-2 Channels
Integrated drivers

Piezo Stepper Motors (PiezoWalk®), Flexure Actuators & Classical Piezo Actuators
Piezo Stepper Nanopositioning Motors Piezo Stepper Motor Controllers Piezostage Systems & Flexure Actuators Piezo Bender Actuators PICMA® Piezo Stack Actuators
Sub-nm Resolution
Push/Pull to 60 Kg
Vacuum Compatible
High Resolution
Unlimited Travel
High Dynamics
Flexure Guided
Closed- & Open-Loop
Resolution <1 nm
Travel: to 2 mm
Extreme Lifetime
Sub-msec Response
Sub-nm Resolution

Selection Guides: Piezo Linear Motors: Ultrasonic & Step Motors
Piezo Linear Actuators | Piezostage Systems | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
NEXLINE® & NEXACT® Ultra-High-Resolution Nanopositioning Drives
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
N-310 N-310 NEXACT® Ultra-compact nanopositioning drive, subnanometer resolution. 1 20 Piezo-Walk®
N-110 N-111 NEXLINE® PiezoWalk® nanopositioning drive, subnanometer resolution. 8 5 Piezo-Walk®
N-214 N-214 NEXLINE® PiezoWalk® high-load nanopositioning drive, subnanometer resolution. 60 20 Piezo-Walk®
E-755 NEXLINE Controller E-755 Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution
Ultrasonic Piezo Linear Motors / Actuators for OEMs
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
P-653 P-653 PILine® Miniature Linear Motor / Slide:
8 mm in length
0.005 2 PILine® ultrasonic motor
P-652 P-652 Miniature Piezo Linear Motors for OEMs:
9.0 x 6.5 x 2.4 mm3
0.005 3.2 PILine® ultrasonic motor
P-661, P-668 P-661
Ultrasonic OEM piezo linear motors, small, light,
very fast
- - PILine® ultrasonic motor
M-674 M-674 RodDrive Ultrasonic Piezo Linear Motor Pusher
for OEMs
0.7 100 PILine® ultrasonic motor
Linear Stages with Ultrasonic Piezo Linear Motors
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
P-653 P-653 PILine® Miniature Linear Motor / Slide:
8 mm in length
0.005 2 PILine® ultrasonic motor
P-652 P-652 Piezo Motor Micro-Stage for OEMs:
9.0 x 6.5 x 2.4 mm3
0.005 3.2 PILine® ultrasonic motor
M-661, M-662 M-661,
Miniature stages with linear
motor drive, open-loop, speeds to
500 mm/s, 0.1 µm resolution
0.5 18, 20 PILine® ultrasonic motor
M-663 M-663 Smallest stage with linear encoder and
linear motor drive, speed
to 500 mm/s, 0.1 µm resolution.
XY combinations possible
0.5 20 PILine® ultrasonic motor
M-664 M-664 M-664 micropositioning systems are low-profile, high-accuracy translation stages with piezo linear encoders. 0.5 25 PILine® ultrasonic motor
M-682 M-682 M-682 translation stages are low-profile, high-accuracy positioning systems based on the M-674 RodDrive ultrasonic linear motor actuator. 5 50 PILine® ultrasonic motor
M-686 M-686 Linear motor-driven XY stage with linear
encoder, 0.1 µm resolution
5 25 PILine® ultrasonic motor
Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors
Click Image for
Data Sheet
Models* Description Channels Outputs for
Motor Types
C-180 C-180 -
Analog / pulsed drivers
for PILine® ultrasonic piezo linear motors.
1 PILine®
TTL / analog
C-170 C-170 Redstone open-loop controller/driver
for PILine® ultrasonic piezo linear motors.
1, 2 PILine®
C-866 C-866 High-speed, closed-loop controller/driver
for closed-loop PILine® piezomotors.
1 PILine®
USB, RS-232
Piezoelectric Rotary Motors
Click Image for
Data Sheet
Models* Description
Rotary Motors PMR 40.08 Nonmagnetic, for low-speed applications, suited for hazardous environments, excellent start-stop performance, millisecond response time

* Ask about custom designs!

More Papers and Literature

Piezo Motor Brochures: Ultrasonic High Speed Motors for
     Automation PiezoWalk® Piezo Motors for Ultra-Precision
     Motion Control

White Papers on Ultrasonic Piezo Motors: Ultrasonic
     Piezo Rotary Motors and Linear Piezo Motors

New technique for studying nanoscale friction at sliding
     velocities up to 200 mm/s using atomic force microscope
     (by Zhenhua Tao and Bharat Bhushan). Uses a custom tuned
     piezomotor stage.

Piezo-Based, Long-Travel Actuators For Special
     Environmental Conditions

Survey of the Various Operating Principles of Ultrasonic

High Precision Piezo Linear Motor for Semiconductor

New Linear Ultrasonic Micromotor for Precision Mechatronic

More on Linear Ultrasonic Micromotor for Precision
     Mechatronic Systems

Piezoelectric Motor Basics on Wikipedia
Piezo Motor for OCT Scanner
Nanometer Precise Hybrid Actuator in Positioning Mechanism
     with Long Travel Range

Test Stand for Analyzing New Types of High-Performance
     Ultrasonic Piezomotor Drives

Hybrid Piezo Motor Actuators
Piezoelectric Motor Selection Guide
PI Piezo Motor News at the ACTUATOR 2006 Conference
Piezo Motor Application: Miniature Motor in Cell-phone Camera Module for Auto Focus & Zoom

Animated 3D Mode of an Ultrasonic Rotary Piezo Motor,
Measured with a Scanning Vibrometer

Ultrasonic Piezo Motor Driven Stage, Animation

 PI NEXLINE® Piezo Motor Animation (Dithering & Step Mode)

Watch Piezo Mini Motor Video
P-652 In Motion

 Watch PI RodDrive Animation
PILine RodDrive Piezo Motor integrated in positioning stage, animation.