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P-652 Ultra-Compact Ultra-Sonic Actuators
M-674 PILine® RodDrive: Integrated Ultrasonic Piezoelectric Linear Actuator
M-238 Ultra-High-Load Precision Linear Actuators
Extreme Life-Time Tests for PICMA® Piezo Actuators
SEMI Award for NEXLINE®Linear Motors
Photonics Award for PICMA Actuators
New PiezoWalk Brochure

Piezo Step Motor Brochure


New PILine Brochure

Ultrasonic Piezomotor
for High-Speed Actuation
and Positioning



500 page PI Catalog

Get the hardbound, 500
    page PI Catalog
Piezo Motor Solutions for Automation & Ultra-Precision Motion Control
Download the PI Piezo Motor PDF Brochures       Piezo Motor White Papers
Piezo Stack Actuators, Transducers & Piezo Flexure Stages


Micro Piezomotor Linear Drive High velocity, Compact size (9x6x2mm)


High Speed Ultrasonic Piezo Linear
Motor Drive (Pusher)


Ultra Precision (Sub-nm) PiezoWalk®
High Force Piezomotors
 
PI currently manufactures two basic types of piezoelectric linear motors: Ultrasonic linear motors (resonant motors), and stepper motors (PiezoWalk®). Both offer an auto-locking feature and can basically provide unlimited travel, yet they are very different in their design, specifications and performance.

PILine® ultrasonic resonant motors are characterized by very high speed to 800 mm/s and a very compact and simple design (systems down to 9x6x2 mm are available).

NEXLINE® & NEXACT® piezo step linear motors can achieve much higher forces and picometer range resolution but are not as fast.

Piezo step and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...
Selection Guides
Piezo Motor Cell-phone Camera Module: Auto Focus & Zoom
Download the PI Piezo Motor PDF Brochures
Piezo Linear Motor Introduction
PILine® Ultrasonic Piezomotor Working Principle
NEXLINE® Piezo-Walk® Working Principle
Test and Quality Control at PI
More Papers and Literature
PI Piezo Motor Videos




Ultrasonic Motors, Actuators and Stages
Ultrasonic Micro
Motors / Stages


Cost Effective
Ultra Compact
Travel Range 3.2 mm
Ultrasonic Piezo Linear
Motors / Actuators


Fast: to 800 mm/sec
Compact
Self-Locking
Linear Stages w/ Ultrasonic Motors

Travel: 20 mm-50 mm
20000 h MTBF
Vacuum Versions
XY-Piezomotor
Stages


Fast: to 100 mm/s
Travel: 25 x 25 mm
0.1 µm Resolution
Ultrasonic Piezo
Motor Controllers


Open- & Closed-Loop
1-2 Channels
Integrated drivers

Piezo Stepper Motors (PiezoWalk®), Flexure Actuators & Classical Piezo Actuators
Piezo® Stepper Nanopositioning Motors

Sub-nm Resolution
Push/Pull to 60 Kg
Vacuum Compatible
Piezo®Stepper Motor
Controllers


High Resolution
Unlimited Travel
High Dynamics
Lever®Amplified Piezo Actuators / Stages

Flexure Guided
Closed- & Open-Loop
Resolution <1 nm
Piezo® Bender
Actuators


Closed-Loop
Vacuum-Compatible
Travel: to 2 mm
PICMA® Piezo Stack Actuators

Extreme Lifetime
Sub-msec Response
Sub-nm Resolution


Selection Guides: Piezo Linear Motors: Ultrasonic & Step Motors
Piezo Linear Actuators | Piezo Flexure Stages | Piezo Tip/Tilt Platforms | Piezo Ceramic Materials | Precision Actuator Overview |
NEXLINE® & NEXACT® Ultra-High-Resolution Nanopositioning Drives
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
N-310 N-310 NEXACT® Ultra-compact nanopositioning drive, subnanometer resolution. 1 20 Piezo-Walk®
N-110 N-111 NEXLINE® PiezoWalk® nanopositioning drive, subnanometer resolution. 8 5 Piezo-Walk®
N-214 N-214 NEXLINE® PiezoWalk® high-load nanopositioning drive, subnanometer resolution. 60 20 Piezo-Walk®
E-755 NEXLINE Controller E-755 Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution
Ultrasonic Piezo Linear Motors / Actuators for OEMs
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
P-652 P-652 Miniature Piezo Linear Motors for OEMs:
9.0 x 6.5 x 2.4 mm3
0.005 3.2 PILine® ultrasonic motor
P-661, P-668 P-661
P-664
P-668
Ultrasonic OEM piezo linear motors, small, light,
very fast
- - PILine® ultrasonic motor
M-674 M-674 RodDrive Ultrasonic Piezo Linear Motor Pusher
for OEMs
0.7 100 PILine® ultrasonic motor
Linear Stages with Ultrasonic Piezo Linear Motors
Click Image for
Data Sheet
Models* Description Load
Capacity [kg]
Travel [mm] Drive
P-652 P-652 Piezo Motor Micro-Stage for OEMs:
9.0 x 6.5 x 2.4 mm3
0.005 3.2 PILine® ultrasonic motor
M-661, M-662 M-661,
M-662
Miniature stages with linear
motor drive, open-loop, speeds to
500 mm/s, 0.1 µm resolution
0.5 18, 20 PILine® ultrasonic motor
M-663 M-663 Smallest stage with linear encoder and
linear motor drive, speed
to 500 mm/s, 0.1 µm resolution.
XY combinations possible
0.5 20 PILine® ultrasonic motor
M-664 M-664 M-664 micropositioning systems are low-profile, high-accuracy translation stages with piezo linear encoders. 0.5 25 PILine® ultrasonic motor
M-682 M-682 M-682 translation stages are low-profile, high-accuracy positioning systems based on the M-674 RodDrive ultrasonic linear motor actuator. 5 50 PILine® ultrasonic motor
M-686 M-686 Linear motor-driven XY stage with linear
encoder, 0.1 µm resolution
5 25 PILine® ultrasonic motor
Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors
Click Image for
Data Sheet
Models* Description Channels Outputs for
Motor Types
Interfaces
C-180 C-180 -
C-185
Analog / pulsed drivers
for PILine® ultrasonic piezo linear motors.
1 PILine®
Piezomotor
TTL / analog
C-170 C-170 Redstone open-loop controller/driver
for PILine® ultrasonic piezo linear motors.
1, 2 PILine®
Piezomotor
RS-232
C-866 C-866 High-speed, closed-loop controller/driver
for closed-loop PILine® piezomotors.
1 PILine®
Piezomotor
USB, RS-232
Piezoelectric Rotary Motors
Click Image for
Data Sheet
Models* Description
Rotary Motors PMR 40.08 Nonmagnetic, for low-speed applications, suited for hazardous environments, excellent start-stop performance, millisecond response time


* Ask about custom designs!

More Papers and Literature

Piezo Motor Brochures: Ultrasonic High Speed Motors for
     Automation PiezoWalk® Piezo Motors for Ultra-Precision
     Motion Control

White Papers on Ultrasonic Piezo Motors: Ultrasonic
     Piezo Rotary Motors and Linear Piezo Motors

New technique for studying nanoscale friction at sliding
     velocities up to 200 mm/s using atomic force microscope
     (by Zhenhua Tao and Bharat Bhushan). Uses a custom tuned
     piezomotor stage.

Piezo-Based, Long-Travel Actuators For Special
     Environmental Conditions

Survey of the Various Operating Principles of Ultrasonic
     Piezomotors

High Precision Piezo Linear Motor for Semiconductor
     Applications

New Linear Ultrasonic Micromotor for Precision Mechatronic
     Systems

More on Linear Ultrasonic Micromotor for Precision
     Mechatronic Systems

Piezoelectric Motor Basics on Wikipedia
Nanometer Precise Hybrid Actuator in Positioning Mechanism
     with Long Travel Range

Test Stand for Analyzing New Types of High-Performance
     Ultrasonic Piezomotor Drives

Hybrid Piezo Motor Actuators
Piezoelectric Motor Selection Guide
PI Piezo Motor News at the ACTUATOR 2006 Conference
Piezo Motor Application: Miniature Motor in Cell-phone Camera Module for Auto Focus & Zoom

 PI NEXLINE® Piezo Motor Animation (Dithering & Step Mode)

Watch Piezo Mini Motor Video
P-652 In Motion

 Watch PI RodDrive Animation
PILine RodDrive Piezo Motor integrated in positioning stage, animation.


Animated 3D Mode of an Ultrasonic Rotary Piezo Motor, Measured with a Scanning Vibrometer


Ultrasonic Piezo Motor Driven Stage, Animation





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